The 3rd R&D machine has been installed in Shanghai University

Machine Model: Multi950-R&D

Technology: PVD+PECVD

Built Time:  2015
Location:  Shanghai, China

Installation & Testing:  5 days

Commissioning & Training: 3 days

Design Features:

1.  Flexibility: Arc and sputtering cathodes, Ion source mounting flanges are standardized for flexible exchange;

2.  Versatility: can deposit a variety of base metals and alloys; optical coatings, hard coatings, soft coatings, compound films and solid lubricating films on the metallic and non-metallic materials substrates.

3. Straight forward design: 2-door structure, front & back opening for easy maintenance.

The Multi950 machine is a customized multiple functions vacuum deposition system for R&D. After half a year's discussion with Shanghai University’s team led by Professor Chen, we finally confirmed the design and configurations to fulfill their  R&D applications. This system is able to deposit transparent  DLC film with PECVD process, hard coatings on tools, and optical film with sputtering cathode. Based on this pilot machine design concept, we have developed 3 other coating systems after then:

1. Bipolar Plate Coating for Fuel Cell Electric Vehicles-RT1200-FCEV

2. Ceramic Direct Plated Copper-  RT1200-DPC

3. Flexible Sputtering System-  RTSP1200-PCB

These 4 model machines are all with Octal chamber, flexible and reliable performances are extensively used in various applications. It satisfy the coating processes require multi different metal layers: Al, Cr, Cu, Au, Ag, Ni, Sn, SS and many other non-ferromagnetic metals; plus the Ion source unit, efficiently  enhance films adhesion on different
substrate materials with its plasma etching performance and, the PECVD process to deposit some carbon-based layers.

The Multi950 is the milestone of advanced design coating systems for Royal Tech.  Here, we thank Shanghai University students and especially Process Yigang Chen, his creative and selfless dedication are unlimited values and inspire our team.

In 2018, we had another project cooperation with Professor  Chen, the C-60 material deposition by Inductive thermal evaporation method. We appreciate Mr. Yimou Yang and Professor Chen's leadership and instruction on every innovative project.

Contact us please for more information.